An optical switch is fabricated by using micromachining technology, which is based on thin nanocrystalline vanadium oxide (VOx) film, and it consists of four layers: a silicon (Si) substrate layer, a VOxlayer, a Si3N4buffer layer, and an aurum (Au) electrode layer. By applying a switching power supply to a pair of the Au electrodes, the optical switch is controlled to exhibit from an "on" state with semi-conducting phase to an "off" state with metallic phase. The optical switch performance is investigated, and testing results show that its extinction ratio is about 14 dB, its switching respons...
