MEMS capacitive accelerometer for the Internet of Things (IoT) applications is designed with open-loop structure rather than closed-loop structure to achieve low power consumption. In the open-loop structure, voltage control readout technique is preferred for low cost. However, the voltage control readout technique suffers from low dynamic range and low power efficiency (in terms of $\mathbf {FoM}$ ). In this paper, the voltage control ratiometric (VCR) readout technique is proposed to improve both dynamic range and power efficiency. The VCR readout technique is demonstrated in a readout circu...
