期刊论文、会议论文

Shi, Xiong

英文

Sensor Letters

1546-198X

2008

6

1

178-183

International Conference of Thermal, Mechanical and Multiphysics Simulation and Experiments in Microelectronics and Microsystems

APR 24-26, 2006

Lombardy, ITALY

[Shi, Xiong] Wuhan Polytech Univ, Dept Elect & Informat Engn, Wuhan 430023, Peoples R China.^[Gan, Zhi-Yin;Liu, Sheng] Huazhong Univ Sci & Technol, Inst Microsyst, Wuhan 430074, Peoples R China.^[Gan, Zhi-Yin;Liu, Sheng] Huazhong Univ Sci & Technol, Wuhan Natl Lab Optoelect, Wuhan 430074, Peoples R China.

26650 THE OLD RD, STE 208, VALENCIA, CA 91381-0751 USA

AMER SCIENTIFIC PUBLISHERS

10.1166/sl.2008.023

本校为第一且通讯机构

A platform is proposed in this paper for fundamental study of the miniaturized MEMS packaging on its long term performance such as actual vacuum level maintaining inside the packaging cavity, and durability of the packaging shell subjected to cycling thermal loading. In particular, a sensor composed of quartz crystal is introduced for vacuum measurement. The quartz crystal is placed in the internal cavity of the MEMS packaging and is excited by an exciting source which is formed by Direct Digital Synthesizer (DDS). The voltage signal from both ends of the quartz crystal is outputed to comparis...