期刊论文

中文

武汉轻工大学学报

2095-7386

2024

43

03

90-98

10.3969/j.issn.2095-7386.2024.03.013

本校为第一机构

为了解决2.45 GHz微波等离子体化学沉积(MPCVD)装置沉积金刚石面积小、质量低的问题,提出了一款新型915 MHz半球形的MPCVD装置,并使用COMSOL软件对装置的结构进行优化设计.优化结果表明,当薄板与中心轴的距离为70 mm时,顶部电场强度仅为500 V/m,可以有效屏蔽谐振腔顶部次生电场的产生.将气体入口设置在谐振腔顶部时,气流会从基片台上均匀地横向扩散到底部排气孔,保证了反应物在基片台上的均匀分布.腔体底部的调谐机构可将谐振腔内的电场强度维持在4 000 V/m以上,以确保金刚石的生长条件.优化设计了同轴天线穿过矩形波导的距离和同轴波导中心到短路活塞的距离,将反射系数S11降低到-8.7 dB.设计的...

In order to solve the problem of small diamond deposition area and low quality in 2.45 GHz mi-crowave plasma chemical deposition(MPCVD)device,a new 915 MHz hemispherical MPCVD device was proposed,and COM SOL software was used to optimize the structure of the device.The optimization results show that when the distance between the thin plate and the central axis is 70 mm,the top electric field in-tensity is only 500 V/m,which can effectively shield the secondary electric field at the top of the resonator.The gas inlet is arranged perpendicular to the substrate,and the substrate evenly diffused h...