China Hubei Provincial Science & Technology Department [2011CHB030]
机构署名：
本校为第一且通讯机构
院系归属：
电气与电子工程学院
摘要：
In this paper, nanocrystalline VO2 thin film is fabricated by a kind method of two steps and its phase-transition characteristics are investigated. The two-step method contains low-temperature reactive ion sputtering and post-annealing, and its process parameters determine the phase-transition properties of fabricated VO2 thin film. With optimized process parameters, VO2 thin film with nanocrystalline structure can be successfully fabricated and has excellent phase-transition performance for smart ...
