期刊论文

Yang, Jun

英文

IEEE JOURNAL OF SOLID-STATE CIRCUITS

0018-9200

2020

55

9

2529-2538

10.1109/JSSC.2020.3005811

Manuscript received January 22, 2020; revised March 27, 2020; accepted May 11, 2020. Date of publication July 8, 2020; date of current version August 26, 2020. This article was approved by Associate Editor Piero Malcovati. This work was supported in part by the National Natural Science Foundation of China (NSFC) under Grant 61834002 and in part by the National Key Research and Development Program of China under Grant 2018YFB2202001. (Corresponding author: Jun Yang.) Longjie Zhong and Jun Yang are with the National ASIC Research Center, Southeast University, Nanjing 210096, China (e-mail: dragon@seu.edu.cn).

本校为其他机构

The bandwidth-enhanced oversampling successive approximation (BE-OSA) readout technique is proposed in this article to reduce the noise floor of the readout circuit for micro-electromechanical systems (MEMS) capacitive accelerometer while achieving high power efficiency in terms of the figure of merit (FoM). The open-loop structure has been widely used in MEMS capacitive accelerometer for the Internet of Things (IoT) applications due to its low power consumption. However, in the open-loop accelerometer, the capacitance variation in the sensing ...