With the adjustment of fabricating process parameters, some novel nanostructured vanadium dioxide (VO2) thin films are prepared and their thermoelectrical and optical properties can be well controlled. Through the photoelectric characteristic measurement and analysis of these VO2thin films, two typical kinds of nanostructured VO2thin films are proposed. One kind of thin films has good thermo-sensitive characteristics for infrared, and its temperature coefficient of resistance (TCR) value reaches -2.6%, which is very suitable for infrared focal plane arrays. The other kind of thin films has low...
