Based on converting both the matrix (Ta) and the analytes (Mn, Cr, and Cu) into different volatile fluorides at high temperature in a graphite furnace, an in situ matrix removal method was developed for the determination of trace amounts of Mn, Cr, and Cu in high purity tantalum pentaoxide (Ta_2O_5) by electrothermal vaporization-inductively coupled plasma mass spectrometry (ETV-ICP-MS) with a polytetrafluoroethylene slurry (PTFE) as the chemical modifier. The experimental results showed that the more volatile TaF_5 was removed in situ during the pyrolysis stage prior to the determination of t...