期刊论文

Xu, Donglai

英文

IEEE TRANSACTIONS ON CIRCUITS AND SYSTEMS I-REGULAR PAPERS

1549-8328

2020

67

8

2578-2587

10.1109/TCSI.2020.2979316

Manuscript received November 6, 2019; revised February 19, 2020; accepted March 3, 2020. Date of publication March 12, 2020; date of current version July 31, 2020. This work was supported in part by the National Natural Science Foundation of China (NSFC) under Grant 61771363, and in part by National Research Foundation of Singapore under Grant NRF-CRP11-2012-01. This article was recommended by Associate Editor R. Rieger. (Corresponding author: Donglai Xu.) Longjie Zhong is with the National ASIC Research Center, Southeast University, Nanjing 210096, China.

本校为通讯机构

This paper proposes a clock strategy to improve the precision of power-efficient readout circuit for capacitive sensor. To achieve high power efficiency, capacitive sensor such as MEMS accelerometer is designed with open-loop architecture rather than close-loop one. In the open-loop architecture, the capacitance variation of sensing element is limited to femto-farad level in order to overcome nonlinearity problem. However, due to this limitation, the signal charge from sensing element is weak and the interference charge due to coupling capacita...