For high-temperature-resolution microbolometric focal plane arrays, the required characteristic parameter of substrate temperature fluctuation suppression is analyzed and discussed. The microbolometric temperature response to the temperature change of an infrared imaging target is theoretically derived from the microbolometer physical models of infrared imaging and thermoelectric. Based on the theoretical temperature responsivity expression of the microbolometer, the substrate temperature fluctuation suppression precision for high-temperature-resolution microbolometric focal plane arrays is th...